Low-Energy Ion Irradiation of Solid Surfaces
Seiten
1998
Springer Berlin (Hersteller)
978-3-540-65007-2 (ISBN)
Springer Berlin (Hersteller)
978-3-540-65007-2 (ISBN)
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The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.
TOC: Introduction.- Interaction of low-energy ions with solids.- Sputtering of multicomponent materials.- Ionization processes at surfaces.- Ion bombardment of crystalline semiconductors.- Summary
TOC: Introduction.- Interaction of low-energy ions with solids.- Sputtering of multicomponent materials.- Ionization processes at surfaces.- Ion bombardment of crystalline semiconductors.- Summary
| Zusatzinfo | 97 figs. |
|---|---|
| Verlagsort | Berlin |
| Sprache | englisch |
| Einbandart | gebunden |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik |
| Technik ► Maschinenbau | |
| ISBN-10 | 3-540-65007-5 / 3540650075 |
| ISBN-13 | 978-3-540-65007-2 / 9783540650072 |
| Zustand | Neuware |
| Informationen gemäß Produktsicherheitsverordnung (GPSR) | |
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