Low-Energy Ion Irradiation of Solid Surfaces

Hubert Gnaser (Autor)

Buch | Softcover

VIII, 294 Seiten

2013 | Softcover reprint of the original 1st ed. 1999
Springer Berlin (Verlag)
978-3-662-14739-9 (ISBN)

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The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

Introduction.- Interaction of low-energy ions with solids.- Sputtering of multicomponent materials.- Ionization processes at surfaces.- Ion bombardment of crystalline semiconductors.- Summary

Erscheint lt. Verlag	20.11.2013
Reihe/Serie	Springer Tracts in Modern Physics
Zusatzinfo	VIII, 294 p. 69 illus., 9 illus. in color.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	438 g
Themenwelt	Naturwissenschaften ► Chemie ► Physikalische Chemie
	Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
	Technik ► Maschinenbau
Schlagworte	Molecule • semiconductor • semiconductors • Surface
ISBN-10	3-662-14739-4 / 3662147394
ISBN-13	978-3-662-14739-9 / 9783662147399
Zustand	Neuware