Silicon Semiconductor Technology
Springer Fachmedien Wiesbaden GmbH (Verlag)
978-3-658-41040-7 (ISBN)
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.
lt;p>About the Author
Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989.Wafer fabrication.- Thermal oxidation.- Lithography.- Etching technology.- Doping techniques.- Chemical and Physical Deposition.- Metallization and Contacts.
| Erscheinungsdatum | 04.08.2023 |
|---|---|
| Zusatzinfo | XI, 264 p. 178 illus., 2 illus. in color. |
| Verlagsort | Wiesbaden |
| Sprache | englisch |
| Maße | 168 x 240 mm |
| Gewicht | 472 g |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Schlagworte | Chemical vapor deposition • CMOS • CMOS Circuit Integration • Dry etching • ion implantation • Local Oxidation of Silicon • Nano Technology • Oxidation • Packaging • Processing of Silicon • semiconductor • Silicon • Silicon On Insulator • Technology |
| ISBN-10 | 3-658-41040-X / 365841040X |
| ISBN-13 | 978-3-658-41040-7 / 9783658410407 |
| Zustand | Neuware |
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