Run-to-Run Control in Semiconductor Manufacturing
Seiten
2000
Crc Press Inc (Verlag)
978-0-8493-1178-9 (ISBN)
Crc Press Inc (Verlag)
978-0-8493-1178-9 (ISBN)
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Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.
| Erscheint lt. Verlag | 30.11.2000 |
|---|---|
| Zusatzinfo | 27 Tables, black and white |
| Verlagsort | Bosa Roca |
| Sprache | englisch |
| Maße | 156 x 234 mm |
| Gewicht | 625 g |
| Einbandart | gebunden |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Technik ► Maschinenbau | |
| ISBN-10 | 0-8493-1178-0 / 0849311780 |
| ISBN-13 | 978-0-8493-1178-9 / 9780849311789 |
| Zustand | Neuware |
| Informationen gemäß Produktsicherheitsverordnung (GPSR) | |
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