Frontiers of Characterization and Metrology for Nanoelectronics
2007 International Conference on Frontiers of Characterization and Metrology
Seiten
2007
|
2007 ed.
American Institute of Physics
978-0-7354-0441-0 (ISBN)
American Institute of Physics
978-0-7354-0441-0 (ISBN)
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Frontiers of Characterization and Metrology for Nanoelectronics
This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.
This book contains peer-reviewed papers presented at the 2007 International Conference on Frontiers of Characterization and Metrology. It emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It provides an effective portrayal of the industry's characterization and metrology needs and how they are being addressed. It also offers a foundation for further advances in metrology and new ideas for research and development.
| Erscheint lt. Verlag | 17.10.2007 |
|---|---|
| Reihe/Serie | AIP Conference Proceedings ; 931 |
| Zusatzinfo | Illustrations (some col.) |
| Verlagsort | New York |
| Sprache | englisch |
| Maße | 216 x 279 mm |
| Themenwelt | Naturwissenschaften ► Physik / Astronomie ► Mechanik |
| Technik ► Elektrotechnik / Energietechnik | |
| ISBN-10 | 0-7354-0441-0 / 0735404410 |
| ISBN-13 | 978-0-7354-0441-0 / 9780735404410 |
| Zustand | Neuware |
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