Advanced Ceramic Oxides for Electronics.

Alexander Michaelis (Autor)

Buch | Softcover

157 Seiten

2006
Fraunhofer IRB Verlag
978-3-8167-7216-3 (ISBN)

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Advanced ceramic oxides play a dominant role in electronics as functional films with dielectric, piezoelectric, ferroelectric or superconducting properties. For integration of these films into passive or active devices different technologies such as electrochemical and thermal formation or CVD and PVD (chemical or physical vapour deposition) are established. In this treatise the effect of fabrication technology on the film properties is studied with focus on electrochemical formation. As one important example for electrochemical dielectric film formation, Ta-capacitor manufacturing is discussed. It is shown that anodic valve metal oxide films are promising as "high k" materials for active devices such as DRAM storage capacitors or MOSFET gate oxides as well. For characterization of oxide films at high lateral resolution, the new method of SAME (spectroscopic anisotropy micro-ellipsometry) is introduced.

Erscheint lt. Verlag	27.10.2006
Reihe/Serie	Schriftenreihe Kompetenzen in Keramik ; 1
Zusatzinfo	num. illus. a. tab.
Verlagsort	Stuttgart
Sprache	englisch
Maße	148 x 210 mm
Themenwelt	Naturwissenschaften ► Chemie ► Technische Chemie
	Naturwissenschaften ► Physik / Astronomie
	Technik ► Elektrotechnik / Energietechnik
Schlagworte	alternative dielectric • Alternative dielectrics • Ceramic • ceramic oxide • Ceramic oxides • Ceramics • electroceramic • Electroceramics • Electrochemistry • Fraunhofer IKTS • HC/Physik, Astronomie/Sonstiges • vertical transistor device • vertical transistor devices
ISBN-10	3-8167-7216-1 / 3816772161
ISBN-13	978-3-8167-7216-3 / 9783816772163
Zustand	Neuware