Secondary Ion Mass Spectrometry
Fundamentals, Advancements and Applications
Seiten
2025
Royal Society of Chemistry (Verlag)
9781837671007 (ISBN)
Royal Society of Chemistry (Verlag)
9781837671007 (ISBN)
Briefly introduces the fundamentals of the Secondary Ion Mass Spectrometry (SIMS) technique and discusses in detail recent advancements and applications in various branches of science.
Secondary ion mass spectrometry (SIMS) is a technique used to analyse the composition of solid surfaces and thin films by sputtering the surface of the specimen with a primary ion beam and collecting and analysing ejected secondary ions. The technique has been applied to quality assurance in semiconductor manufacture, in forensics for enhancement of fingerprints and to determine the composition of cometary dust.
This book briefly introduces the fundamentals of the SIMS technique and discusses in detail recent advancements and applications in various branches of science. From an extensive literature review, it provides a good overview of how to reproduce the most prominent experiments and what instruments are required or suited to the analysis. It will inspire new designs and hence research for the future. Appealing to graduates or postgraduates who want an overview of the field and how to use this technique, researchers new to this field will find innovative solutions and how to achieve them detailed herein.
Secondary ion mass spectrometry (SIMS) is a technique used to analyse the composition of solid surfaces and thin films by sputtering the surface of the specimen with a primary ion beam and collecting and analysing ejected secondary ions. The technique has been applied to quality assurance in semiconductor manufacture, in forensics for enhancement of fingerprints and to determine the composition of cometary dust.
This book briefly introduces the fundamentals of the SIMS technique and discusses in detail recent advancements and applications in various branches of science. From an extensive literature review, it provides a good overview of how to reproduce the most prominent experiments and what instruments are required or suited to the analysis. It will inspire new designs and hence research for the future. Appealing to graduates or postgraduates who want an overview of the field and how to use this technique, researchers new to this field will find innovative solutions and how to achieve them detailed herein.
Introductory Chapter
High Impact Energy
Cluster Ion Beams and Sputtering
High-performance Analysers in SIMS
Hybrid System Combining SIMS and Scanning Probe Microscopy
Hybrid System Combining SIMS and Focused Ion Beam-scanning Electron Microscopy
Multivariate Data Analysis
Simulations
Electronic Materials and Devices
Polymer Analysis by SIMS
Bioscience
Geochemistry and Cosmochemistry
Forensics
| Erscheinungsdatum | 28.05.2025 |
|---|---|
| Reihe/Serie | New Developments in Mass Spectrometry ; Volume 16 |
| Verlagsort | Cambridge |
| Sprache | englisch |
| Maße | 156 x 234 mm |
| Gewicht | 1015 g |
| Themenwelt | Naturwissenschaften ► Chemie ► Analytische Chemie |
| Technik ► Maschinenbau | |
| ISBN-13 | 9781837671007 / 9781837671007 |
| Zustand | Neuware |
| Informationen gemäß Produktsicherheitsverordnung (GPSR) | |
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