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Physical Modelling and Identification of Nonlinear Effects in Microelectromechanical Systems

Ulrike Nabholz (Autor)

Buch | Softcover

XIII, 191 Seiten

2021
Universitätsverlag Chemnitz
9783961001293 (ISBN)

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Analytical and semi-analytical physical models for MEMS are derived from nonlinear mechanics. By taking into account system characteristics and assumptions, system identification enables the derivation of a mathematical model that is tailored to the effect and the MEMS under analysis. Such an adapted model can successfully emulate and explain the nonlinear dynamics of individual MEMS, including resonant actuation of parasitic modes. The performed analyses also confirm that small deviations in the mode spectrum between devices influence the occurrence of nonlinear effects.

Erscheinungsdatum	20.04.2021
Zusatzinfo	Illustrationen
Verlagsort	Chemnitz
Sprache	englisch
Maße	148 x 210 mm
Gewicht	304 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Modellierung • Nichtlineares Phänomen • NichtlinearesPhänomen • Simulation
ISBN-13	9783961001293 / 9783961001293
Zustand	Neuware