Surface Metrology for Micro- and Nanofabrication

Wei Gao (Autor)

Buch | Softcover

448 Seiten

2020
Elsevier Science Publishing Co Inc (Verlag)
978-0-12-817850-8 (ISBN)

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Prof. Wei Gao is the Chair of the Precision Nanometrology Laboratory and Director of the Research Center for Precision Nanosystems at the Department of Fine Mechanics in the Graduate School of Engineering, Tohoku University, Japan. His research focuses on precision engineering, precision metrology, micro/nano-nanometrology, optical sensors, surface metrology, on-machine and in-process measurement, and motion measurement.

1. Noncontact Scanning Electrostatic Force Microscope2. Quartz Tuning Fork Atomic Force Microscope3. Micropipette Ball Probing System4. Low-Force Elastic Beam Surface Profiler5. Linear-Scan Micro Roundness Measuring Machine6. Micro-Gear Measuring Machine7. On-Machine Length Gauge Surface Profiler8. On-Machine Air-Bearing Surface Profiler9. On-Machine Atomic Force Microscope10. On-Machine Roll Profiler11. In-Process Fast Tool Servo Profiler12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness

Erscheinungsdatum	30.10.2020
Reihe/Serie	Micro & Nano Technologies
Sprache	englisch
Maße	191 x 235 mm
Gewicht	910 g
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-12-817850-7 / 0128178507
ISBN-13	978-0-12-817850-8 / 9780128178508
Zustand	Neuware