MEMS Silicon Oscillating Accelerometers and Readout Circuits

Buch | Hardcover

312 Seiten

2018
River Publishers (Verlag)
978-87-7022-045-3 (ISBN)

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Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Yong Ping Xu, National University of Singapore, Singapore.

MEMS Silicon Oscillating Accelerometers and Readout Circuits

Erscheinungsdatum	06.03.2019
Verlagsort	Gistrup
Sprache	englisch
Maße	156 x 234 mm
Gewicht	585 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Umwelttechnik / Biotechnologie
ISBN-10	87-7022-045-X / 877022045X
ISBN-13	978-87-7022-045-3 / 9788770220453
Zustand	Neuware