Quantitative Data Processing in Scanning Probe Microscopy

SPM Applications for Nanometrology

Petr Klapetek (Autor)

Buch | Softcover

416 Seiten

2018 | 2nd edition
Elsevier Science Publishing Co Inc (Verlag)
978-0-12-813347-7 (ISBN)

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Quantitative Data Processing in Scanning Probe Microscopy: SPM Applications for Nanometrology, Second Edition describes the recommended practices for measurements and data processing for various SPM techniques, also discussing associated numerical techniques and recommendations for further reading for particular physical quantities measurements. Each chapter has been revised and updated for this new edition to reflect the progress that has been made in SPM techniques in recent years. New features for this edition include more step-by-step examples, better sample data and more links to related documentation in open source software.

Scanning Probe Microscopy (SPM) techniques have the potential to produce information on various local physical properties. Unfortunately, there is still a large gap between what is measured by commercial devices and what could be considered as a quantitative result. This book determines to educate and close that gap.

Associated data sets can be downloaded from http://gwyddion.net/qspm/

Petr Klapetek is Head, Department of Nanometrology at the Czech Metrology Institute, Czech Republic. His research focuses on the metrology scanning probe microscope (SPM) construction, a key standard for nanometrology.He also participates in the Gwyddion project, focused on the creation of multiplatform open-source software for scanning probe microscopy (SPM) data analysis.

1. Motivation2. Instrumentation Principles3. Data Models4. Basic Data Processing5. Dimensional Measurements6. Force and Mechanical Properties7. Friction and Lateral Forces8. Electrostatic Fields9. Magnetic Fields10. Local Current Measurements11. Thermal Measurement12. Optical Measurements13. Sample Data Files14. Numerical Modeling Techniques

Erscheinungsdatum	10.02.2018
Reihe/Serie	Micro & Nano Technologies
Sprache	englisch
Maße	191 x 235 mm
Gewicht	840 g
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-12-813347-3 / 0128133473
ISBN-13	978-0-12-813347-7 / 9780128133477
Zustand	Neuware