Measurement Technology for Micro-Nanometer Devices (eBook)

Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue (Autoren)

eBook Download: EPUB

2016 | 1. Auflage
344 Seiten
John Wiley & Sons (Verlag)
978-1-118-71799-8 (ISBN)

Infos

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

* Highlights the advanced research work from industry and academia in micro-nano devices test technology
* Written at both introductory and advanced levels, provides the fundamentals and theories
* Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Autor

WENDONG ZHANG, North University of China, China XIUJIAN CHOU, North University of China, China TIELIN SHI, Huazhong University of Science and Technology, China ZONGMIN MA, North University of China, China HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China JING CHEN, Peking University, China LIGUO CHEN, Soochow University, China DACHAO LI, Tianjin University, China CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

Produkt-Details

• Erscheint lt. Verlag: 18.10.2016
• Sprache: englisch
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• Schlagworte: Control Process & Measurements • Electrical & Electronics Engineering • Elektrotechnik u. Elektronik • Maschinenbau • Materials Science • Materialwissenschaften • mechanical engineering • MEMS • Mess- u. Regeltechnik • Mikroelektronik • Nanoelektronik • Optical and Non-Linear Optical Materials • Optische u. Nichtlineare Optische Materialien
• ISBN-10: 1-118-71799-6 / 1118717996
• ISBN-13: 978-1-118-71799-8 / 9781118717998