Optical Characterization of Epitaxial Semiconductor Layers

Günther Bauer, Wolfgang Richter (Herausgeber)

Buch | Hardcover

XVI, 429 Seiten

1995 | 1., Ed.
Springer Berlin (Verlag)
978-3-540-59129-0 (ISBN)

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The last decade has witnessed an explosive development in the growth of epitaxial layers and structures partially with atomic scale dimensions. This progress has created new demands for the characterization of those structures. Various methods have been refined and new ones were developed with the main emphasis on non-destructive in-situ characterization. Among those, methods which rely on the interaction of electromagnetic radiation with matter are particularly valuable. In this book standard methods such as far-infrared spectroscopy, ellipsometry, Raman scattering, and high-resolution X-ray diffraction are presented, as well as new advanced techniques which provide the potential for better in-situ characterization of epitaxial structures

Sprache	englisch
Maße	155 x 235 mm
Gewicht	788 g
Einbandart	gebunden
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Epitaxie • Halbleiterphysik • Halbleiterschicht • HC/Technik/Elektronik, Elektrotechnik, Nachrichtentechnik
ISBN-10	3-540-59129-X / 354059129X
ISBN-13	978-3-540-59129-0 / 9783540591290
Zustand	Neuware