Introduction to Microsystem Design (eBook)

Werner Karl Schomburg (Autor)

eBook Download: PDF

2015 | 2nd ed. 2015
XXIV, 374 Seiten
Springer Berlin (Verlag)
978-3-662-47023-7 (ISBN)

Infos

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Inhalt

Preface 6
Preface of the First Edition 7
Contents 9
Notations and Symbols 11
List of Tables 23
1 Introduction 25
2 Scaling Laws 27
3 Elastic Deformations 29
4 Thin Films 33
Exercises 40
5 Conductor Paths 46
Exercises 52
6 Electrical Measurements 54
Exercises 65
7 Membranes 66
Exercises 92
8 Strain Gauges on Membranes 95
Exercises 109
9 Beams 113
Exercises 129
10 Vibrations 133
Exercises 150
11 Capillaries 156
Exercises 177
12 Capacitive Forces 181
Exercises 193
13 Piezoelectric Effect 194
Exercises 214
14 Thermal Actuators 219
Exercises 234
15 Micro Optics 240
Exercises 252
16 Diffusion 254
Exercises 263
17 Micro Valves 265
Exercises 286
18 Micro Pumps 292
Exercises 309
19 Micro Dosing 315
20 Analogies of Physical Domains 317
Exercises 323
21 Mechanical Devices for Electronics 326
Exercises 335
22 Pressure Sensors 339
Exercises 348
23 Flow Sensors 351
Exercises 363
24 Inertial Sensors 366
Exercises 372
List of Characteristic Curves of Actuators 374
List of Characteristic Curves of Sensors 374
Typical Material Properties 375
References 376
Index 381

Produkt-Details

• Erscheint lt. Verlag: 25.6.2015
• Reihe/Serie: RWTHedition
• Zusatzinfo: XXIV, 374 p. 380 illus., 332 illus. in color.
• Verlagsort: Berlin
• Sprache: englisch
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Schlagworte: Deflections of micro membranes and beams • Electrostatic sensors and actuators • Micro capillaries • microfluidic systems • Piezoelectric sensors and actuators • Strain gauges • Thermal actuators
• ISBN-10: 3-662-47023-3 / 3662470233
• ISBN-13: 978-3-662-47023-7 / 9783662470237