Lithography

S Landis (Autor)

Software / Digital Media

320 Seiten

2013
John Wiley & Sons Inc (Hersteller)
978-1-118-55766-2 (ISBN)

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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

Erscheint lt. Verlag	7.3.2013
Verlagsort	New York
Sprache	englisch
Maße	150 x 250 mm
Gewicht	3436 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	1-118-55766-2 / 1118557662
ISBN-13	978-1-118-55766-2 / 9781118557662
Zustand	Neuware