Digital Holography for MEMS and Microsystem Metrology (eBook)

Anand Asundi (Autor)

eBook Download: EPUB

2011
John Wiley & Sons (Verlag)
978-1-119-97278-5 (ISBN)

Infos

Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes.

• Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies.
• Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications.
• Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.

Anand Asundi, Nanyang Technological University, Singapore
Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world.
He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.

Inhalt

About the Editor.

List of contributors.

Chapter 1 Introduction (A. Asundi).

Chapter 2 Digital Reflection Holography and applications (V.R. Singh and A. Asundi).

2.1 Introduction to digital holography and methods.

2.2 Reflection digital holographic microscopy (DHM) developments.

2.3 3D imaging, static and dynamic measurements.

2.4 MEMS/Microsystems characterization applications.

Chapter 3 Digital Transmission Holography and applications (Qu Weijuan).

3.1 Historical Introduction.

3.2 Foundation of Digital Holography.

3.3 Digital Holographic Microscopy System.

3.4 Conclusion.

Chapter 4 Digital In-line Holography and applications (slima Khanam).

4.1. Back ground.

4.2. Digital in-line holography.

4.3. Methodology for 2D measurement of micro-particle.

4.4. Validation and performance of the 2D measurement method.

4.5. Methodology for 3D measurement of micro-fiber.

4.6. Validation and performance of the 3D measurement methods.

4.7. Summary & conclusions.

Chapter 5 Other Applications.

5.1 Digital Holography Tomography (DHT) (Yu Yingjie).

5.2 High resolution Pulsed Digital Holography (Caojin Yuan and Hongchen Zhai).

5.3 Digital Holographic Interferometry for Phase Distribution Measurement (Jianlin Zhao).

Chapter 6 Conclusion.

Produkt-Details

• Erscheint lt. Verlag: 5.7.2011
• Reihe/Serie: Microsystem and Nanotechnology Series
• Reihe/Serie: Microsystem and Nanotechnology Series
• Reihe/Serie: The Wiley Microsystem and Nanotechnology Series
• Sprache: englisch
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Schlagworte: Apparatetechnik u. Biosensoren • Bioinstrumentation & Biosensors • biomedical engineering • Biomedizintechnik • Electrical & Electronics Engineering • Elektrotechnik u. Elektronik • industrial inspection of digital holography, the use of digital holography, applications of digital holography for MEMS characterization, digital holography and residual stress measurement, digital holography and design and evaluation, digital holography and device testing and inspection, particle characterization and digital holography, dynamic measurement of particles in 3D, digital holography and microfluidics, digital holography and crystallization, digital holography and aerosol detection studies • materials characterization • Materials Science • Materialwissenschaften • MEMS • Messtechnik • Photonics & Lasers • Photonik u. Laser • Werkstoffprüfung • Werkstoffprüfung
• ISBN-10: 1-119-97278-7 / 1119972787
• ISBN-13: 978-1-119-97278-5 / 9781119972785