Microsystem Technology and Microrobotics

Sergej Fatikow, Ulrich Rembold (Autoren)

Buch | Softcover

XII, 408 Seiten

2010 | 1. Softcover reprint of the original 1st ed. 1997
Springer Berlin (Verlag)
978-3-642-08232-0 (ISBN)

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. Pictures and photos ease understanding and a wealth of references allow further work.

The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. Pictures and photos ease understanding and a wealth of references allow further work.

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.

Erscheint lt. Verlag	3.12.2010
Zusatzinfo	XII, 408 p.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	637 g
Themenwelt	Informatik ► Theorie / Studium ► Künstliche Intelligenz / Robotik
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Schlagworte	Actuator • Complexity • Control • Development • Information • microsystems • robot • Robotics • Sensor
ISBN-10	3-642-08232-7 / 3642082327
ISBN-13	978-3-642-08232-0 / 9783642082320
Zustand	Neuware