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Handbook of Thin Film Technology

Hartmut Frey, Hamid R. Khan (Herausgeber)

Buch | Hardcover

XIII, 380 Seiten

2015 | 1st ed. 2015
Springer Berlin (Verlag)
978-3-642-05429-7 (ISBN)

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"Handbook of Thin Film Technology" covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Applications and developments of thin film technology.- Importance of the vacuum technology for thin film coatings.- Evaporation in the vacuum.- Basic principle of plasma physics.- Gaseous phase and surface processes.- Coating by cathode sputtering.- Plasma treatment methods.- Ion beam-supported procedures.- Chemical Vapor Deposition (CVD).- Physical basics of modern methods of surface and thin film analysis.- Measurements of thin layers during the coating.- Measurements of thin layers after terminated coating process.- Nanoparticle Films.- Optical properties of thin films.

Erscheint lt. Verlag	25.8.2015
Zusatzinfo	XIII, 380 p. 413 illus., 20 illus. in color.
Verlagsort	Berlin
Sprache	englisch
Maße	178 x 254 mm
Gewicht	905 g
Themenwelt	Technik ► Maschinenbau
Schlagworte	Coating characterization • Coatings • Dünnschichttechnologie • Film characterization • Film deposition techniques • Thin layers
ISBN-10	3-642-05429-3 / 3642054293
ISBN-13	978-3-642-05429-7 / 9783642054297
Zustand	Neuware