Thin-Film Diamond II (eBook)

(part of the Semiconductors and Semimetals Series)

Christopher Nebel (Herausgeber)

eBook Download: PDF

2004 | 1. Auflage
410 Seiten
Elsevier Science (Verlag)
978-0-08-054104-4 (ISBN)

Infos

Part II reviews the state of the art of thin film diamond a very promising new semiconductor that may one day rival silicon as the material of choice for electronics.

Diamond has the following important characteristics, it is resistant to radiation damage, chemically inert and biocompatible and it will become the material for bio-electronics, in-vivo applications, radiation detectors and high-frequency devices.

Thin-Film Diamond II is the first book to summarize state of the art of CVD diamond in depth. It covers the most recent results regarding growth and structural properties, doping and defect characterization, hydrogen in and on diamond as well as surface properties in general, applications of diamond in electrochemistry, as detectors, and in surface acoustic wave devices

* Accessible by both experts and non-experts in the field of semi-conductors research and technology, each chapter is written in a tutorial format?

* Assisting engineers to manufacture devices with optimized electronic properties?

* Truly international, this volume contains chapters written by recognized experts representing academic and industrial institutions from Europe, Japan and the US

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Part II reviews the state of the art of thin film diamond a very promising new semiconductor that may one day rival silicon as the material of choice for electronics. Diamond has the following important characteristics; it is resistant to radiation damage, chemically inert and biocompatible and it will become "e;the material"e; for bio-electronics, in-vivo applications, radiation detectors and high-frequency devices. Thin-Film Diamond II is the first book to summarize state of the art of CVD diamond in depth. It covers the most recent results regarding growth and structural properties, doping and defect characterization, hydrogen in and on diamond as well as surface properties in general, applications of diamond in electrochemistry, as detectors, and in surface acoustic wave devices* Accessible by both experts and non-experts in the field of semi-conductors research and technology, each chapter is written in a tutorial format* * Assisting engineers to manufacture devices with optimized electronic properties* * Truly international, this volume contains chapters written by recognized experts representing academic and industrial institutions from Europe, Japan and the US

Inhalt

Cover 1
Contents 6
List of Contributors 12
Preface 14
Chapter 1. Hydrogen Diffusion and Acceptor Passivation in Diamond 16
1. Introduction 16
2. Hydrogen Incorporation in Diamond and Analysis 17
3. Locations and Charge States of Hydrogen 19
4. Diffusion Properties of Hydrogen in Monocrystalline Diamond 21
5. Passivation of Boron Acceptors by Hydrogen 32
6. Model for the Formation of (B,H) Pairs 37
7. Thermal Stability of (B,H) Pairs and Hydrogen 40
8. Conclusion 46
Acknowledgements 47
References 47
Chapter 2. Structural and Electronic Properties of Diamond Surfaces 52
1. Introduction 52
2. Surface Reconstructions and Surface States 54
3. The Electron Affinity of Diamond Surfaces 67
4. Surface Band Bending 76
5. Hydrogen-Induced Surface Conductivity 97
Acknowledgements 108
References 108
Chapter 3. Electrochemistry of Diamond 112
1. History of Electrochemistry on Diamond 112
2. General Properties of Diamond Electrodes 113
3. Semiconducting Electrodes 117
4. Electrochemical Characterization of Diamond Films 121
5. Summary 129
Acknowledgements 130
References 130
Chapter 4. Electroanalytical Applications of Diamond Electrodes 136
1. Introduction 136
2. Basics of Electrochemical Measurements 136
3. Diamond Electrode Architectures, Substrate Materials, and Electrochemical Cells 138
4. Basic Electrochemical Properties of Microcrystalline Diamond Thin-Film Electrodes 143
5. Basic Electrochemical Properties of Nanocrystalline Diamond Thin-Film Electrodes 148
6. Spectroelectrochemistry 151
7. Electroanalytical Applications 152
8. Conclusions 159
Acknowledgements 160
References 160
Chapter 5. Industrial Applications of Diamond Electrodes 164
1. Diamond Electrodes: Specification 164
2. Fabrication Method 174
3. Microanalysis with Diamond Electrodes 179
4. Electrochemical Reactors for Synthesis and Water Treatment 182
5. Electrosynthesis of Organics and Oxidants 186
6. Application of BDD Electrodes in Water Treatment 197
Acknowledgements 209
References 209
Chapter 6. Diamond-based Radiation and Photon Detectors 212
1. Introduction 212
2. Fundamentals 218
3. Influence of Defects on Detector Performance 236
4. The Effect of the Polycrystalline Nature of CVD Diamond 261
5. Application to Photodetection 265
6. Application to Radiation Detection 309
7. Concluding Remarks 315
Acknowledgements 317
References 318
Chapter 7. Diamond Field Effect Transistors Using H-Terminated Surfaces 326
l. Introduction„Diamond Electronics 326
2. Surface Electric Properties of Diamond and the Structure of Surface Channel FETs 327
3. Low Schottky Barrier Heights on H-Terminated Diamond 331
4. Acceptor and Carrier Distributions Under the H-Terminated Surfaces 335
5. High-Frequency Operation of Diamond Fets 338
6. Electrolyte-Solution-Gate Diamond Field Effect Transistor 343
7. Nanodevice Formation by Local Oxidation of Diamond 347
8. Summary 350
References 351
Chapter 8. Diamond Surface Acoustic Wave Device 354
1. Introduction 354
2. Saw Device and Diamond Saw 354
3. Basic Saw Parameters 355
4. Characteristics of Diamond Saw Devices 361
5. Diamond Wafer Technology and Fabrication Process 363
6. Applications 367
7. Summary 372
References 373
Index 374
Contents of Volumes in This Series 388

Produkt-Details

• Erscheint lt. Verlag: 19.4.2004
• Sprache: englisch
• Themenwelt: Sachbuch/Ratgeber
• Themenwelt: Schulbuch / Wörterbuch
• Themenwelt: Naturwissenschaften ► Physik / Astronomie
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• ISBN-10: 0-08-054104-6 / 0080541046
• ISBN-13: 978-0-08-054104-4 / 9780080541044