Semiconductor Sensors

Buch | Hardcover

576 Seiten

1994
Wiley-Interscience (Verlag)
978-0-471-54609-2 (ISBN)

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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.

Classification and Terminology of Sensors (S. Sze).

Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).

Acoustic Sensors (M. Motamedi & R. White).

Mechanical Sensors (B. Kloeck & N. de Rooij).

Magnetic Sensors (H. Baltes & R. Castagnetti).

Radiation Sensors (S. Audet & J. Steigerwald).

Thermal Sensors (S. Van Herwaarden & G. Meijer).

Chemical Sensors (S. Morrison).

Biosensors (A. Dewa & W. Ko).

Integrated Sensors (K. Najafi, et al.).

Appendices.

Index.

Erscheint lt. Verlag	8.11.1994
Sprache	englisch
Maße	162 x 245 mm
Gewicht	916 g
Themenwelt	Naturwissenschaften ► Physik / Astronomie ► Festkörperphysik
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	0-471-54609-7 / 0471546097
ISBN-13	978-0-471-54609-2 / 9780471546092
Zustand	Neuware