Surface and Thin Film Analysis

A Compendium of Principles, Instrumentation, and Applications

Henning Bubert, Holger Jenett (Herausgeber)

Buch | Hardcover

XVII, 336 Seiten

2002 | 1., Auflage
Wiley-VCH (Verlag)
978-3-527-30458-5 (ISBN)

Infos

The development and quality assurance of such high-tech materials as semiconductors or biopolymers demand special analytical methods for surfaces and thin films. This book presents the whole spectrum of methods available in a clear manner, moving beyond the basics, equipment and applications to compare these methods. This allows users to find the optimum method in solving any given problem.
- The book is richly illustrated with 200 figures
- Almost 900 references guide to the primary literature
- A list of suppliers, each with full address, makes it easy to obtain the required equipment

Inhalt

INTRODUCTION
ELECTRON DETECTION
Photoelectron Spectroscopy (XPS, UPS)
Auger Electron Spectroscopy (AES, SAM)
Electron Energy Loss Spectroscopy (EELS)
Low-energy Electron Diffraction (LEED)
Other Electron Detecting Techniques (AEAPS, IAES, INS, MQS, IETS)
ION DETECTION
Static Secondary Ion Mass Spectrometry (SSIMS)
Dynamic Secondary Ion Mass Spectrometry (SIMS)
Electron Beam and HF-Plasma Secondary Neutral Mass Spectrometry (SNMS)
Laser-SNMS
Rutherford Backscattering Spectroscopy (RBS)
Low Energy Ion Scattering (LEIS)
Elastic Recoil Detection Analysis (ERDA)
Nuclear Reaction Analysis (NRA)
Other Ion Detecting Techniques (ESD, ESDIAD, TDS, GDMS, FABMS, APFIM, POSAP)
PHOTON DETECTION
Total Reflection X-Ray Fluorescence Analysis (TXRF)
Energy-dispersive X-ray Spectroscopy (EDXS)
Grazing Incidence X-Ray Methods for Near-surface Structural Studies
Glow Discharge Optical Emission Spectroscopy (GD-OES)
Surface Analysis by Laser Ablation
Ion Beam Spectrochemical Analysis (IBSCA)
Reflection Absorption IR Spectroscopy (RAIRS)
Surface-enhanced Raman Scattering (SERS)
UV/VIS/IR Ellipsometry (ELL)
Other Photon Detecting Techniques (SXAPS, DAPS, IPES, BIS)
SCANNING MICROSCOPY
Atomic Force Microscopy (AFM)
Scanning Tunneling Microscopy (STM)
SUMMARY AND COMPARISON OF TECHNIQUES
SURFACE ANALYTICAL EQUIPMENT SUPPLIERS
REFERENCES

Produkt-Details

• Sprache: englisch
• Maße: 170 x 240 mm
• Gewicht: 820 g
• Einbandart: gebunden
• Themenwelt: Naturwissenschaften ► Chemie
• Schlagworte: Chemie / Theoretische Chemie • Chemische Analyse • Dünne Schicht • Dünnschichttechnologie • Oberfläche • Oberflächenanalyse
• ISBN-10: 3-527-30458-4 / 3527304584
• ISBN-13: 978-3-527-30458-5 / 9783527304585
• Zustand: Neuware