Functional Thin Films and Nanostructures for Sensors (eBook)

Synthesis, Physics and Applications

Jeffrey Fortin, Anis Zribi (Herausgeber)

eBook Download: PDF

2009 | 2009
XVIII, 214 Seiten
Springer US (Verlag)
978-0-387-68609-7 (ISBN)

Infos

This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

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In recent years, there has been a convergence of fundamental materials science and materials processing methods. This convergence, although highly interdisciplinary in nature, has been brought about by technologies such as bandgap engineering and related techniques that have led to application-specific devices such as lab-on- chip and system-on-a-chip. The demand for reduced device size, device portability, and low power dissipation coupled with high speed of operation continues to dictate terms and conditions for the evolution of nanotechnology. The present trend in approaches to systems manufacturing continues to focus on integration of mul- functionalities on the same chip. These functionalities include, for example, - board laser sources, sensors, and amplifiers. Both the military and civilian markets continue to drive the research and development component. In recent years, the emergency preparedness guidance systems have added excitement and curiosity to this expanding industry. The outgrowth of technologies of interest for emergency preparedness includes the development of terahertz sources and detectors and s- tems for detection of explosives and concealed weapons, among others. Sensors made from bulk materials have been around for a long time. Enormous advances in the processing technologies of thin films have led to the ability to manufacture application-specific functional thin films.

Inhalt

Foreword 7
Series Preface 9
Integrated Analytical Systems 9
Preface 11
Editor Biographies 13
Contents 14
Contributors 15
Sensor Design Guidelines 16
The Big Picture 16
Sensor Architecture 18
Sensor Figures of Merit/Performance Attributes 19
Input Dynamic Range 20
Response Curve 20
Sensitivity 21
Response Time 22
Resolution 22
Accuracy 23
Precision 23
Hysteresis and Drift 23
Selectivity 23
Sensor Design Considerations 24
Selection and/or Invention of the Transduction Mechanism 24
Selection of Transducer Material 25
Physical and Chemical Considerations 26
Melting Point 26
Glass Transition Temperature 27
Elasticity and Plasticity 27
Viscosity 28
Optical Properties 29
Summary 30
References 31
Transduction Principles 32
Introduction 32
Piezoresistivity 34
Piezoelectricity 35
Electrical—Resistance, Capacitance, Impedance, Tunneling 37
Thermoelectricity Overview of Theory 40
Optical and Radiation Techniques Overview of Theory 41
Electrochemical Overview of Theory 42
Summary 43
References 44
Growth and Synthesis of Nanostructured Thin Films 45
Introduction 45
Gas Phase Fabrication Techniques 46
Thermal Vapor Transport Methods 47
Catalyst-Assisted Fabrication Methods 48
Physical Vapor Deposition Methods 49
Chemical Vapor Deposition Methods 51
Liquid Phase Fabrication Techniques 52
Sol–Gel Methods 53
Diblock Copolymer Methods 53
Spin Coating Methods 53
Electrochemical Deposition/Etching Methods 55
Electrospinning Methods 56
Template-Based Synthesis Techniques 58
Direct Replication Methods 58
Partial Replication Methods 59
Glancing Angle Deposition (GLAD) 59
Oblique Angle Deposition (OAD) 60
Glancing Angle Deposition (GLAD) 62
Growth of Vertically Aligned Nanorod Arrays 63
Growth of Helical Nanostructures 64
Integration of Multilayered Nanorod Structures with Different Morphology 66
Integration of Multilayered Nanorod Structures with Different Materials 67
Phase Modulation: Controlling the Shape of the Nanorods 69
Phase Modulation: Controlling the Orientation of the Nanorods 70
Formation of Regular Array of Nanorods by Templates 72
Control of NSTF Film Porosity 72
Formation of Nanostructured Architectures on Optical Fiber 73
Summary on GLAD 76
References 76
Integrated Micromachining Technologies for Transducer Fabrication 79
Introduction 79
Micro- and Nanostructuring 80
Lithography 80
Pattern Transfer 84
Micro- and Nanostructure and Device Integration 87
Micro- and Nanostructures for Sensing 88
Sensitive Material Integration 90
Summary 94
References 94
Applications of Functional Thin Films and Nanostructures in Gas Sensing 99
Introduction 99
Nondispersive Infrared (NDIR) Systems Introduction 100
Theory of Absorption of Radiation Radiation 101
Absorption Spectra of Common Gases 102
Absorption Law 102
Nondispersive Mid-IR Gas-Sensing Systems Introduction 105
Source and Waveguide 105
Detector 106
Filter 109
GE-Telaire NDIR System Introduction 112
Telaire Low-Cost NDIR System 112
Mid-IR LEDs and MBE 113
Telaire’s CO 114
RCLED 114
Summary 115
References 116
Chemical Sensors: New Ideas for the Mature Field 117
Introduction 117
Requirements for Ideal and Practical Chemical Sensors 120
Concepts for Ubiquitous Chemical Sensors 123
Case Studies 125
Electrical Energy Transduction 125
Mechanical Energy Transduction 135
Radiant Energy Transduction 141
Summary 149
References 150
Applications of Functional Thin Films for Mechanical Sensing 158
Types of Mechanical Sensors and Sensing Principles 158
Principle of Transduction 159
Displacement Measurement Without Functional Thin Films 160
Displacement Sensing with Functional Films 160
Stress Sensing with Functional Films 161
Other Uses of Functional Films in Mechanical Sensors 161
Preparation of Functional Thin Films 161
Piezoelectric Films 162
Piezoresistive Films 163
Analysis of Displacement and Stress 165
Beam Displacement Analysis 167
Beam Stress Analysis 168
Membrane Displacement and Stress Analysis 170
Examples of Mechanical Sensors 172
Conclusions 176
References 177
Sensing Infrared and Terahertz Regions by Functional Films 179
Introduction 179
Intersubband Infrared Photodetectors Based on Quantum Heterostructures Intersubband Infrared Photodetectors 180
QWIP, QRIP, and QDIP Structures and Principles of Operation 181
Comparison of Dark Currents in QWIPs, QRIPs, and QDIPs 184
Capture Probability 187
Responsivity and Photoelectric Gain 190
Detectivity 192
Conclusions 196
Sensing THz Region 197
Impurity in Quantum Well Structures 197
Confined Acceptors 198
Theory of Confined Acceptors in QW 200
Plasma Waves and Oscillations in Two-Dimensional Electron Systems 203
Resonant Detection of THz Radiation Using Excitation of Plasma Oscillations 208
Comments 210
Ultrasensitive THz Detector Using Cold-Electron Bolometer 211
Optimization of the CEB in Presence of the Background Power Load 214
Ultimate Noise Performance of CEB-General NEP Formula 216
Summary 218
References 218
Index 222

Produkt-Details

• Erscheint lt. Verlag: 5.4.2009
• Reihe/Serie: Integrated Analytical Systems
• Zusatzinfo: XVIII, 214 p. 100 illus.
• Verlagsort: New York
• Sprache: englisch
• Themenwelt: Naturwissenschaften ► Physik / Astronomie
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Themenwelt: Technik ► Maschinenbau
• Schlagworte: Material • Micromachining • nanostructure • Sensor • sensors • Thin Films • transducer
• ISBN-10: 0-387-68609-6 / 0387686096
• ISBN-13: 978-0-387-68609-7 / 9780387686097