Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

Rudolf Reichelt, Ludwig Reimer (Autoren)

Rudolf Reichelt (Herausgeber)

Buch | Hardcover

2020 | 3rd ed. 2021
Springer Berlin (Verlag)
978-3-540-85317-6 (ISBN)

Infos

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Inhalt

Introduction.- Electron optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.-

Produkt-Details

• Zusatzinfo: Approx. 510 p. 260 illus.
• Verlagsort: Berlin
• Sprache: englisch
• Maße: 155 x 235 mm
• Themenwelt: Naturwissenschaften ► Physik / Astronomie ► Atom- / Kern- / Molekularphysik
• Schlagworte: Rasterelektronenmikroskopie • Rasterelektronen Mikroskopie • Scanning Tunneling Microscopy
• ISBN-10: 3-540-85317-0 / 3540853170
• ISBN-13: 978-3-540-85317-6 / 9783540853176
• Zustand: Neuware