Micro System Technologies 90

1st International Conference on Micro, Electro, Opto Mechanic Systems and Components, Berlin, September 10-13, 1990

Herbert Reichl (Herausgeber)

XV, 858 Seiten

1990
Springer Berlin (Hersteller)
978-3-540-53025-1 (ISBN)

Infos

The proceedings of the 1st International Conference on Micro, Electro and Mechanic Systems and Components, held in Berlin in September 1990, are presented in this volume.

Inhalt

Contents: Simulation and Design: Design of Micro Systems.- CAD of Optical Devices.- Simulation and Design - Electrical and Thermal Properties.- Simulation and Design of Sensors.- Measurement and Testing: Testing.- Material Characterization - Physical Properties; Semiconductor Characteristics; Optical Methods.- Materials: Materials for Packaging and Passivation.- Integrated Optics Materials and Technologies.- Technologies: Pattern Generation and Image Transfer.- Laser Supported Deposition.- Reactive Etching and Deposition.- Contact Methods.- Packaging.- Optical Assembly and Interconnection Technologies.- Sensor and Actuator Technologies.- Basic Components and Applications: Sensors for Physical Parameters.- Gas and Ionic Sensors.- Sensors for Biological and Medical Application.- Optical Sensors. Optical Components.- Actuators.- Author Index.

Produkt-Details

• Zusatzinfo: 642 figs.
• Verlagsort: Berlin
• Sprache: englisch
• Gewicht: 1460 g
• Einbandart: gebunden
• Themenwelt: Informatik ► Weitere Themen ► CAD-Programme
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• ISBN-10: 3-540-53025-8 / 3540530258
• ISBN-13: 978-3-540-53025-1 / 9783540530251
• Zustand: Neuware