Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit

From Mega-Bit to Giga-Bit

Buch | Softcover

293 Seiten

1998
Taylor & Francis Ltd (Verlag)
978-90-5699-098-5 (ISBN)

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This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.

Hiroyuki Tango

1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation

Erscheint lt. Verlag	26.11.1998
Verlagsort	London
Sprache	englisch
Maße	138 x 216 mm
Gewicht	540 g
Themenwelt	Mathematik / Informatik ► Informatik ► Theorie / Studium
	Informatik ► Weitere Themen ► Hardware
	Technik ► Elektrotechnik / Energietechnik
ISBN-10	90-5699-098-5 / 9056990985
ISBN-13	978-90-5699-098-5 / 9789056990985
Zustand	Neuware