Micro/Nano Manufacturing
Seiten
2017
MDPI (Verlag)
978-3-03842-604-2 (ISBN)
MDPI (Verlag)
978-3-03842-604-2 (ISBN)
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Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology platforms are currently combined in order to exploit the strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding. Manufacturing processes at the micro-scale are the key-enabling technologies to bridge the gap between the nano- and the macro-worlds to increase the accuracy of micro/nano-precision production technologies, and to integrate different dimensional scales in mass-manufacturing processes. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in micro- and nano-scale manufacturing, i.e., on novel process chains including process optimization, quality assurance approaches and metrology.
| Erscheinungsdatum | 27.12.2017 |
|---|---|
| Mitarbeit |
Gast Herausgeber: Hans Nørgaard Hansen, Guido Tosello |
| Verlagsort | Basel |
| Sprache | englisch |
| Themenwelt | Mathematik / Informatik ► Mathematik ► Angewandte Mathematik |
| Naturwissenschaften ► Physik / Astronomie ► Allgemeines / Lexika | |
| Schlagworte | micro- and nano-manufacturing • Micro- and nano-metrology • Micro- and nano-scale replication • Process Chains |
| ISBN-10 | 3-03842-604-0 / 3038426040 |
| ISBN-13 | 978-3-03842-604-2 / 9783038426042 |
| Zustand | Neuware |
| Informationen gemäß Produktsicherheitsverordnung (GPSR) | |
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