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MEMS: A Practical Guide of Design, Analysis, and Applications

Jan Korvink, Oliver Paul (Autoren)

Buch | Hardcover

XXV, 965 Seiten

2006 | 2006
Springer Berlin (Verlag)
978-3-540-21117-4 (ISBN)

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MEMS are rapidly moving from the research laboratory to the mar ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exploring this promising technology, including such giants as INTEL and Motorola. Yet MEMS are fundamentally different from microelectronics. This means that companies with an established track record in these branches need to adapt their skills, whereas companies that want to enter the "miniaturization" market need to establish an entirely new set of capabil ities. The same can be said of engineers with classical training, who will also need to be educated toward their future professional activity in the MEMS field. Here are some questions that a company or technologist may ask: I have an existing product with miniaturization market poten tial. Which technology should I adopt? What are the manufacturing options available for miniaturiza tion? What are the qualitative differences? How do we maintainamarketleadforproductsbased onMEMS? Is there CAD support?Can we outsource manufacturing? Which skills in our current capability need only adaptation? What skills need to be added? Professors Jan Korvink and Oliver Paul have set out to answer these questions in a form that addresses the needs of companies, commercial practitioners, and technologists.

Jan G. Korvink holds a Chair for Microsystem Technology at the University of Freiburg, Germany, where he runs the laboratory for microsystem simulation. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers. His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.

Oliver Paul schloss 1986 sein Physikstudium und 1990 seine Promotion zum Dr. sc. nat. an der ETH Zürich ab. Nach einem Postdoc-Aufenthalt am FhG-ISE nahm er ab 1992 am Labor für Physikalische Elektronik der ETH Zürich die Aufgaben eines Projekt- und Gruppenleiters sowie Lehrbeauftragten wahr. Seit 1998 leitet er den Lehrstuhl für Materialien der Mikrosystemtechnik am IMTEK der Albert-Ludwigs-Universität Freiburg. Er hat unter anderem die Firma Sensirion mitbegründet und war Co-Chair der IEEE MEMS Conference 2004 in Maastricht, Niederlande.

Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.

Erscheint lt. Verlag	8.3.2006
Zusatzinfo	XXV, 965 p.
Verlagsort	Berlin
Sprache	englisch
Maße	155 x 235 mm
Gewicht	1390 g
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
Schlagworte	MEMS (Mikroelektromechanische Systeme) • microelectromechanical system (MEMS) • Microelectromechanical Systems • Micromachining • microsystems • Microtechnology • Optics • Production • Reference • Sensor • Simulation • Standard
ISBN-10	3-540-21117-9 / 3540211179
ISBN-13	978-3-540-21117-4 / 9783540211174
Zustand	Neuware