Semiconductor Manufacturing Technology

Chue San Yoo (Autor)

Buch | Hardcover

484 Seiten

2008
World Scientific Publishing Co Pte Ltd (Verlag)
978-981-256-823-6 (ISBN)

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Provides information on semiconductor research. This book includes process knowledge from raw material preparation to the passivation of chips in a modulized format.

This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

Building Blocks for Integrated Circuits; Thermal Oxidation; Gas Kinetics and Plasma Physics; Chemical Vapor Deposition; Plasma-enhanced Chemical Vapor Deposition and Etching; Pattern Transfer: Photolithography; Pattern Generation: Photomask Processing; Doping Technology; Metallization and Silicidation; Planarization and CMP Technology; Copper and Low k.

Reihe/Serie	Advanced Series in Electrical & Computer Engineering ; 13
Verlagsort	Singapore
Sprache	englisch
Themenwelt	Technik ► Elektrotechnik / Energietechnik
ISBN-10	981-256-823-9 / 9812568239
ISBN-13	978-981-256-823-6 / 9789812568236
Zustand	Neuware