Handbook of Thin Film Process Technology
Seiten
1995
Institute of Physics Publishing (Verlag)
978-0-7503-0311-8 (ISBN)
Institute of Physics Publishing (Verlag)
978-0-7503-0311-8 (ISBN)
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This reference covers the most important thin film deposition techniques, as well as aspects of film processing and the major diagnostic techniques for in-process monitoring. It presents deposition system details and process parameters for a range of common materials and processes.
Physical deposition techniques: thermal evaporation; molecular beam epitaxy; sputtering; thermal spraying. Chemical deposition techniques: chemical vapour deposition. Processing technologies: pattern transfer. Real time diagnostics: diagnostic techniques; optical diagnosis; probes of the gas phase; plasma probes; superconducting matierals; miscellaneous materials. Supplier information.
| Zusatzinfo | illustrations |
|---|---|
| Verlagsort | London |
| Sprache | englisch |
| Maße | 210 x 297 mm |
| Themenwelt | Technik ► Elektrotechnik / Energietechnik |
| Technik ► Maschinenbau | |
| ISBN-10 | 0-7503-0311-5 / 0750303115 |
| ISBN-13 | 978-0-7503-0311-8 / 9780750303118 |
| Zustand | Neuware |
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