An Introduction to Surface-Micromachining

Robert W. Johnstone, Ash Parmaswaran (Autoren)

Buch | Softcover

189 Seiten

2012 | Softcover reprint of the original 1st ed. 2004
Springer-Verlag New York Inc.
978-1-4757-1077-9 (ISBN)

Artikel merken

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.

Erscheint lt. Verlag	12.12.2012
Zusatzinfo	XIII, 189 p.
Verlagsort	New York, NY
Sprache	englisch
Maße	155 x 235 mm
Themenwelt	Sachbuch/Ratgeber ► Natur / Technik ► Garten
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
ISBN-10	1-4757-1077-1 / 1475710771
ISBN-13	978-1-4757-1077-9 / 9781475710779
Zustand	Neuware