Run-to-Run Control in Semiconductor Manufacturing

James Moyne, Enrique del Castillo, Arnon M. Hurwitz (Herausgeber)

Buch | Hardcover

366 Seiten

2000
Crc Press Inc (Verlag)
978-0-8493-1178-9 (ISBN)

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Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

James Moyne, Enrique del Castillo, Arnon M. Hurwitz

Introduction. Background. Identifying Target Applications for Run-to-Run Control. Developing a Run-to-Run Solution: Run-to-Run Algorithms. Developing a Run-to-Run Solution: Practical Extensions to Algorithms. Developing and Deploying Run-to-Run Solutions: Integrating Control. Run-to-Run Control System Deployment Case Studies. Advanced Topics. Conclusions. References.

Erscheint lt. Verlag	30.11.2000
Zusatzinfo	27 Tables, black and white
Verlagsort	Bosa Roca
Sprache	englisch
Maße	156 x 234 mm
Gewicht	625 g
Einbandart	gebunden
Themenwelt	Technik ► Elektrotechnik / Energietechnik
Themenwelt	Technik ► Maschinenbau
ISBN-10	0-8493-1178-0 / 0849311780
ISBN-13	978-0-8493-1178-9 / 9780849311789
Zustand	Neuware