Multi-Wafer Rotating MEMS Machines (eBook)

Turbines, Generators, and Engines

Jeffrey Lang (Herausgeber)

eBook Download: PDF

2009 | 2010
XVI, 456 Seiten
Springer US (Verlag)
978-0-387-77747-4 (ISBN)

Infos

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use.  Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale.  Many of these topics are addressed in this volume, including:materials structures and packagingmulti-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic componentselectroplating magnetic structures into siliconvery-high-speed air bearingsthermofluids and turbomachineryelectric and magnetic generatorscombustion About The MEMs Reference Shelf:"e;The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner."e;STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus

Inhalt

Preface 6
Contents 8
Contributors 15
Introduction to PowerMEMS 16
1.1 Compact Portable Power Considerations 17
1.2 Chemical Energy Sources 18
1.3 Power System Considerations 21
1.4 Conclusion 22
Reference 23
System Design Considerations and Device Overview 24
2.1 Introduction 24
2.2 Thermodynamic and Scaling Considerations 24
2.3 Overview of an MEMS Gas Turbine Engine Design 28
2.4 Bearings and Rotor Dynamics 30
2.5 Turbomachinery Fluid Mechanics 32
2.6 Structures and Materials 34
2.7 Combustion 35
2.8 Engine Controls and Accessories 38
2.9 Engine Design Trades, Component Integration, and Design Evolution 43
2.10 Summary 45
References 46
Materials, Structures and Packaging 48
3.1 Introduction 48
3.2 The Effect of Scale and the Choice of Materials 49
3.3 Design for Room Temperature Strength 51
3.4 Design for High-Temperature Strength 54
3.5 Use of Silicon Carbide in Hybrid Structures 58
3.6 Packaging 65
3.7 Summary 68
References 68
Microengine Fabrication 71
4.1 Introduction 71
4.2 Microengine Devices 71
4.3 Basic Fabrication Processes 75
4.4 Critical Microengine Fabrication Processes 97
4.5 SSE Fabrication 144
4.6 Summary and Outlook 164
References 167
Fabrication of Microscale Rotating Magnetic Machines 171
5.1 Introduction 171
5.2 Basic Principles/Structures 173
5.3 Challenges for Microscale Magnetic Machines 173
5.4 Coils 176
5.5 Soft Magnets 179
5.6 Hard Magnets 184
5.7 Integration in Multi-Wafer Silicon Process 192
5.8 Example Devices 194
5.9 Summary 200
References 202
High-Speed Gas Bearings for Micro- Turbomachinery 205
6.1 Introduction 205
6.2 Related Work 207
6.3 Challenges and Unknowns 208
6.4 Rotordynamic Considerations for MEMS Turbomachinery 210
6.5 Analysis of Hydrostatic Gas Journal Bearings 214
6.6 Whirl Instability in Ultra-Short Gas Journal Bearings 225
6.7 Analysis of Hydrostatic Gas Thrust Bearings 247
6.8 Annular Seals 270
6.9 Experimental Considerations 278
6.10 Design Implications 284
6.11 Summary 288
Nomenclature 289
References 290
Thermofluidics and Turbomachinery 293
7.1 Introduction 293
7.2 Implication of Scale 295
7.3 Microscale Compressor Design and Analysis 310
7.4 Microturbine Design 327
7.5 MEMS Turbocharger 328
7.6 Summary 335
References 335
Motors and Generators 338
8.1 Background 339
8.2 Modeling Simplifications 349
8.3 Electric Induction Machine 350
8.4 Permanent-Magnet Synchronous Machine 376
8.5 Summary 413
References 413
Microcombustors for Rotating Machinery 418
9.1 Introduction 418
9.2 Basic Combustion Concepts 420
9.3 Microcombustor Challenges 424
9.4 Homogeneous Gas-Phase Microcombustor Development 429
9.5 Heterogeneous Catalytic Microcombustor Development 443
9.6 Fabrication and Packaging 456
9.7 Summary 463
References 465
Index 466

Produkt-Details

• Erscheint lt. Verlag: 18.9.2009
• Reihe/Serie: MEMS Reference Shelf
• Zusatzinfo: XVI, 456 p. 302 illus.
• Verlagsort: New York
• Sprache: englisch
• Themenwelt: Technik ► Elektrotechnik / Energietechnik
• Schlagworte: Combustion • Electrical Engineering • gas turbine • gas-turbine engine • Generator • integrated electric generator • Material • materials selection • microelectromechanical system (MEMS) • microengine fabrication • microfabrication technologies • microsystems • MIT gas turbine engine • Motor • multi-wafer silicon process • power MEMS device • Sensor • sensors • Turbomachinery • Wafer
• ISBN-10: 0-387-77747-4 / 0387777474
• ISBN-13: 978-0-387-77747-4 / 9780387777474