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Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures
Buch | Hardcover
XII, 222 Seiten
2004 | 2005
Springer Berlin (Verlag)
978-3-540-22109-8 (ISBN)

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Shape and Functional Elements of the Bulk Silicon Microtechnique - Joachim Frühauf
CHF 149,75 inkl. MwSt

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.

Erscheint lt. Verlag 12.10.2004
Zusatzinfo XII, 222 p.
Verlagsort Berlin
Sprache englisch
Maße 155 x 235 mm
Gewicht 475 g
Themenwelt Naturwissenschaften Chemie Technische Chemie
Technik Elektrotechnik / Energietechnik
Technik Maschinenbau
Schlagworte Design of etch masks and processes • microfluidics • Micromechanics • Microoptics • Microtechnologies • Mikrotechnik • Sensor • sensors • Silicone • Silicone / Silikone • Silicon Etching • Silicon Microstructures
ISBN-10 3-540-22109-3 / 3540221093
ISBN-13 978-3-540-22109-8 / 9783540221098
Zustand Neuware
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