Microscopy of Semiconducting Materials 2003
Seiten
2004
Institute of Physics Publishing (Verlag)
978-0-7503-0979-0 (ISBN)
Institute of Physics Publishing (Verlag)
978-0-7503-0979-0 (ISBN)
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Focuses on international developments in semiconductor studies carried out by various forms of microscopy. This work provides an overview of the instrumentation, analysis techniques, and advances in semiconducting materials science. It is suitable for solid state physicists, chemists, and material scientists.
Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.
Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.
Preface
High Resolution Microscopy and Microanalysis
Self-Organised and Quantum Domain Structures
Epitaxy - Growth Phenomena
Epitaxy - Wide Band-Gap Nitrides
Processed Silicon and Other Device Materials
Metalliztion, Silicides and Contacts
Device Studies
Scanning Electron and Ion Advances
Scanning Probe Microscopy
Indices
Erscheint lt. Verlag | 20.4.2004 |
---|---|
Reihe/Serie | Institute of Physics Conference Series |
Verlagsort | London |
Sprache | englisch |
Maße | 156 x 235 mm |
Gewicht | 1225 g |
Themenwelt | Naturwissenschaften |
Technik ► Elektrotechnik / Energietechnik | |
ISBN-10 | 0-7503-0979-2 / 0750309792 |
ISBN-13 | 978-0-7503-0979-0 / 9780750309790 |
Zustand | Neuware |
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