CMOS Hotplate Chemical Microsensors (eBook)
XII, 125 Seiten
Springer Berlin (Verlag)
978-3-540-69562-2 (ISBN)
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Markus Graf: Degree in Physics: 1992-1999 University of Konstanz, Germany, Exchange year at the University Joseph-Fourier, Grenoble, France, Research Assistant: 1999 Microelectronic Center MIC, Lyngby, Denmark, PhD:1999-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since Feb. 2004, Laureate of the Swiss Technology Award 2004 (together with Diego Barrettino, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: Integrated chemical sensors and CMOS-compatible micromachining.
Diego Barrettino: Dipl.-Ing. degree in electrical engineering: University of Buenos Aires, Argentina, Professional experience: 1997-2000 Analog IC designer at Allegro Microsystems Argentina, PhD: 2000-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since April 2004, Department of Electrical Engineering, University of Washington, Seattle, WA, USA, Laureate of the Swiss Technology Award 2004 (together with Markus Graf, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: analog and digital IC design and the application of control theory in the design of microsystems and MEMS-based microsensors
Andreas Hierlemann: Extensive experience in chemical sensors: PhD: University of Tuebingen on polymer-based acoustic chemical sensors 1992-1996, Postdoc: Sandia National Laboratories: Chemical Microsensor and sensitive-layer development 1997/1998, ETHZ: CMOS chemical microsensor and systems since 1999, Professor since June 2004
Henry Baltes: Professor of Physical Electronics at ETH Zurich and the Director of the Physical Electronics Laboratory (PEL) since 1988. As of June 1, 2004 he is on leave in order to act as Chairman of the ETH Zurich Center of Biosystems Science and Engineering to be located at Basel. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. He is a co-founder of the spin-off company SENSIRION. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. In 1996 he was Visiting Professor at Stanford University and the University of Waterloo. In 2002/03 he was Visiting Scientist at the Ritsumeikan University, the University of Bologna, and the University of Freiburg, Germany. He is a member of the Scientific Council of the Institute for Microelectronics and Microsystems (IMM) of the Italian National Research Council. He also is a member of the International Scientific Committee of the Advanced Research Center on Electronic Systems (ARCES) of the University of Bologna. He is co-editor of the Wiley-VCH book series SENSORS UPDATE and ADVANCED MICRO AND NANOSYSTEMS as well as the Springer book series MICROTECHNOLOGY AND MEMS. From 1991 to 1995 he was the program director of the Swiss Priority Program LESIT. Prior to 1988, he held the Henry Marshall Tory Chair at the University of Alberta, where he was Acting President of the Alberta Microelectronics Centre and a co-founder and Director of LSI Logic Corporation of Canada. From 1974 to 1982 he worked for Landis & Gyr Zug (now Siemens) Switzerland, where he directed the solid-state device laboratory. He received the D. Sc. degree from ETH Zurich in 1971.
Markus Graf: Degree in Physics: 1992-1999 University of Konstanz, Germany, Exchange year at the University Joseph-Fourier, Grenoble, France, Research Assistant: 1999 Microelectronic Center MIC, Lyngby, Denmark, PhD:1999-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since Feb. 2004, Laureate of the Swiss Technology Award 2004 (together with Diego Barrettino, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: Integrated chemical sensors and CMOS-compatible micromachining. Diego Barrettino: Dipl.-Ing. degree in electrical engineering: University of Buenos Aires, Argentina, Professional experience: 1997-2000 Analog IC designer at Allegro Microsystems Argentina, PhD: 2000-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since April 2004, Department of Electrical Engineering, University of Washington, Seattle, WA, USA, Laureate of the Swiss Technology Award 2004 (together with Markus Graf, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: analog and digital IC design and the application of control theory in the design of microsystems and MEMS-based microsensors Andreas Hierlemann: Extensive experience in chemical sensors: PhD: University of Tuebingen on polymer-based acoustic chemical sensors 1992-1996, Postdoc: Sandia National Laboratories: Chemical Microsensor and sensitive-layer development 1997/1998, ETHZ: CMOS chemical microsensor and systems since 1999, Professor since June 2004 Henry Baltes: Professor of Physical Electronics at ETH Zurich and the Director of the Physical Electronics Laboratory (PEL) since 1988. As of June 1, 2004 he is on leave in order to act as Chairman of the ETH Zurich Center of Biosystems Science and Engineering to be located at Basel. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. He is a co-founder of the spin-off company SENSIRION. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. In 1996 he was Visiting Professor at Stanford University and the University of Waterloo. In 2002/03 he was Visiting Scientist at the Ritsumeikan University, the University of Bologna, and the University of Freiburg, Germany. He is a member of the Scientific Council of the Institute for Microelectronics and Microsystems (IMM) of the Italian National Research Council. He also is a member of the International Scientific Committee of the Advanced Research Center on Electronic Systems (ARCES) of the University of Bologna. He is co-editor of the Wiley-VCH book series SENSORS UPDATE and ADVANCED MICRO AND NANOSYSTEMS as well as the Springer book series MICROTECHNOLOGY AND MEMS. From 1991 to 1995 he was the program director of the Swiss Priority Program LESIT. Prior to 1988, he held the Henry Marshall Tory Chair at the University of Alberta, where he was Acting President of the Alberta Microelectronics Centre and a co-founder and Director of LSI Logic Corporation of Canada. From 1974 to 1982 he worked for Landis & Gyr Zug (now Siemens) Switzerland, where he directed the solid-state device laboratory. He received the D. Sc. degree from ETH Zurich in 1971.
Preface 6
Contents 8
Abbreviations 11
1 Introduction 13
2 Miniaturized Metal- Oxide Sensors 17
2.1 Overview ofMicrohotplates for Gas Sensing Applications 17
2.2 Microhotplates in Industrial CMOS Technology 22
2.3 Basic Sensing Mechanisms in Tin- Oxide Materials 22
3 Thermal Modelling of CMOS Microhotplates 29
3.1 Modelling Approach 29
3.2 Microscopic Description and Model Assumptions 32
3.3 FEM-Simulations 35
3.4 Lumped Microhotplate Model 36
3.5 AHDL-Model for SystemSimulations 39
4 Microhotplates in CMOS Technology 41
4.1 Circular Microhotplate 42
4.2 Assessment ofMicrohotplate Temperature Distributions 51
4.3 Microhotplate with Pt Temperature Sensor 55
4.4 Microhotplate with MOS- Transistor Heater 61
4.5 Calorimetric Sensing Mode for Operation at Constant Temperature 70
5 Monolithic Gas Sensor Systems 73
5.1 Single-EndedMixed-Signal Architecture 73
5.2 Differential Analog Architecture for Operating Temperatures up to 500°C 90
6 Microsensor Arrays 99
6.1 Single-Ended Analog Architecture 99
6.2 Differential Mixed-Signal Architecture 104
6.3 Digital Array Architecture 110
7 Conclusion and Outlook 119
Modelling and Simulations 119
Microhotplate Design 120
Integrated Monolithic Systems 121
Sensor-Array Systems 122
Applications and Outlook 123
References 125
Subject Index 135
| Erscheint lt. Verlag | 19.4.2007 |
|---|---|
| Reihe/Serie | Microtechnology and MEMS |
| Zusatzinfo | XII, 125 p. |
| Verlagsort | Berlin |
| Sprache | englisch |
| Themenwelt | Naturwissenschaften ► Chemie |
| Technik ► Elektrotechnik / Energietechnik | |
| Technik ► Maschinenbau | |
| Schlagworte | Chemical sensor • CMOS • Complexity • Control architectures • Design • Integrated systems • Microsensors • Sensor • Simulation |
| ISBN-10 | 3-540-69562-1 / 3540695621 |
| ISBN-13 | 978-3-540-69562-2 / 9783540695622 |
| Haben Sie eine Frage zum Produkt? |
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