Ion Implantation Technology

Edmund G. Seebauer, Susan B. Felch, Amitabh Jain, Yevgeniy V. Kondratenko (Herausgeber)

CD-ROM (Software)

576 Seiten

2009
American Institute of Physics (Hersteller)
978-0-7354-0634-6 (ISBN)

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Covers fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design in ion implantation. This work is suitable for process engineers in the microelectronics industry. It includes contributions from academia and other industry segments: automotive, aerospace, and medical device manufacturing.

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).

Erscheint lt. Verlag	1.4.2009
Reihe/Serie	Progress in Molecular and Subcellular Biology / Marine Molecular Biotechnology ; 1066
Verlagsort	New York
Sprache	englisch
Maße	216 x 279 mm
Themenwelt	Naturwissenschaften ► Physik / Astronomie
	Technik ► Elektrotechnik / Energietechnik
	Technik ► Maschinenbau
ISBN-10	0-7354-0634-0 / 0735406340
ISBN-13	978-0-7354-0634-6 / 9780735406346
Zustand	Neuware